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germane gas

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Foshan Huate Gas Co.,Ltd


Corporation/Limited Liability Company

  • Chinese Supplier

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Purity Grade  semiconductor grade

Formula  GeH4


The gas decomposes near 600K to germanium and hydrogen. Because of its thermal lability, germane is used in the semiconductor industry for the epitaxial growth of germanium by MOVPE or chemical beam epitaxy. Organogermanium precursors (e.g. isobutylgermane, alkylgermanium trichlorides, and dimethylaminogermanium trichloride) have been examined as less hazardous liquid alternatives to germane for deposition of Ge-containing films by MOVPE.

Molecular Weight  76.62g /mol

Alternative name  Germanium tetrahydride, Germanomethane, Monogermane

CAS No. 7782-65-2

Package  CGA350

Additional Info  This item is not permitted to transport by air.

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